Current location: Physics > Plasma > Free Software
4. Hybrid Plasma Equipment Model

Software developed at the University of Illinois for numerical simulation of inductively coupled reactive ion etching reactors.
http://uigelz.ece.uiuc.edu/Projects/HPEM-ICP/index.html - 05-07-2003
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[detailed information]
Rating: [6.00] Votes: [1244]
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5. OOPIC Pro

Object oriented 2-D particle-in-cell code with support for x-y (slab) and r-z (cylindrical) geometries.
http://www.techxhome.com/products/oopic - 22-09-2001
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[detailed information]
Rating: [6.00] Votes: [440]
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